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XY Stages

Applications Micro & Nano Positioning XY Stages

Metrology Stages

Stability, precision and dynamics are crucial in the application fields of PI’s XY stages. They are the basis of high throughput rates and reliable operation. PI makes use of own developments in the fields of PIMag magnetic linear motors and PIglide air bearings. Industrial production and quality control benefit from PI’s high-load XY stages and planar scanners.

Microscopy Stages

For microscopy applications e.g. in the field of topology measurement, fast, repeatable scanning is combined with best velocity constancy by PIline driven sample stages. Their low profile is outstanding in this field. Combination with piezo flexure sample stages makes them very versatile – from Physik Instrumente