Today, Beneq represents the uttermost expertise in ALD. Since 2005, they have launched equipment for research, batch production and continuous industrial manufacturing, all incorporating that special quality that makes their equipment worth your while.
ALD equipment offers proven excellence in technical performance. Systems all combine an uncompromisingly high quality of coating with extremely low cycle times.
Warsash Scientific offer you a diverse palette of equipment, from pure research tools to industrial production workhorses. All equipment is planned, designed and manufactured by professionals for professionals.
Application-specific systems focus on certain processes and properties. These systems are the result of in-depth work together with customers aiming for reliable production equipment and a solution for their opportunity.
TFS 200, for ALD research, including Particle ALD™
TFS 200R, for continuous mode ALD research
TFS 500, for ALD research and batch production
TFS 600, for industrial OLED encapsulation
TFS 1200, for industrial in-line integrated CIGS solar cell buffer layer
TFS NX300, for industrial fully-automated c-Si solar cell surface passivation
P400A and P800, for industrial ALD batch production
WCS 500, for roll-to-roll ALD research and production scale-up