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Home > Products > Thin Films: Atomic Layer Deposition (ALD)

Atomic Layer Deposition (ALD)


Atomic Layer Deposition (ALD)

TFS 200, Atomic Layer Deposition (ALD)

Warsash Scientific offer you a diverse palette of equipment, from pure research tools to industrial production workhorses.


Atomic Layer Deposition (ALD)

Atomic Layer Deposition (ALD)

ALD equipment offers proven excellence in technical performance. Our systems all combine an uncompromisingly high quality of coating with extremely low cycle times.
Technology From: Beneq

Atomic Layer Deposition (ALD)

Today, Beneq represents the uttermost expertise in ALD. Since 2005, they have launched equipment for research, batch production and continuous industrial manufacturing, all incorporating that special quality that makes their equipment worth your while.

ALD equipment offers proven excellence in technical performance. Systems all combine an uncompromisingly high quality of coating with extremely low cycle times.

Warsash Scientific offer you a diverse palette of equipment, from pure research tools to industrial production workhorses. All equipment is planned, designed and manufactured by professionals for professionals.

Application-specific systems focus on certain processes and properties. These systems are the result of in-depth work together with customers aiming for reliable production equipment and a solution for their opportunity.

Product Range
  • TFS 200, for ALD research, including Particle ALD™
  • TFS 200R, for continuous mode ALD research
  • TFS 500, for ALD research and batch production
  • TFS 600, for industrial OLED encapsulation
  • TFS 1200, for industrial in-line integrated CIGS solar cell buffer layer
  • TFS NX300, for industrial fully-automated c-Si solar cell surface passivation
  • P400A and P800, for industrial ALD batch production
  • WCS 500, for roll-to-roll ALD research and production scale-up
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margin-right:304px;">Presented By: Beneq

TFS 200 Atomic Layer Deposition



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All products and information are subject to change without notice.